Forming conductive features of electronic devices
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United States of America Patent
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Dec 18, 2012
Grant Date -
Jul 7, 2011
app pub date -
Mar 3, 2011
filing date -
Feb 24, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is an aerosol method, and accompanying apparatus, for preparing powdered products of a variety of materials involving the use of an ultrasonic aerosol generator including a plurality of ultrasonic transducers underlying and ultrasonically energizing a reservoir of liquid feed which forms droplets of the aerosol. Carrier gas is delivered to different portions of the reservoir by a plurality of gas delivery ports delivering gas from a gas delivery system. The aerosol is pyrolyzed to form particles, which are then cooled and collected. The invention also provides powders made by the method and devices made using the powders.
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