Apparatus and method for thermal management using vapor chamber
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United States of America Patent
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Dec 18, 2012
Grant Date -
Feb 10, 2011
app pub date -
Oct 21, 2010
filing date -
Jul 20, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus includes a plurality of islands each carrying multiple cantilevers. The apparatus also includes a fluidic network having a plurality of channels separating the islands. The channels are configured to provide fluid to the islands, and the fluid at least partially fills spaces between the cantilevers and the islands. Heat from the islands vaporizes the fluid filling the spaces between the cantilevers and the islands to transfer the heat away from the islands while driving the cantilevers into oscillation. The apparatus may also include a casing configured to surround the islands and the fluidic network to create a vapor chamber, where the vapor chamber is configured to retain the vaporized fluid. The islands and the fluidic network could be formed in a single substrate, or the islands could be separate and attached together by a binder located within the channels of the fluidic network.
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