System and method for optical shearing

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United States of America Patent

PATENT NO 8335999
APP PUB NO 20110304835A1
SERIAL NO

12813888

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of exposing a pattern on a light sensitive surface comprises forming a spatially modulated light beam including a rectangular matrix pattern of rows and columns of image data over a surface, wherein the spatially modulated light beam is operable to expose contiguous sub-exposure areas of the surface, each sub-exposure area associated with a datum of the image data, aligning one of the rows or columns of the spatially modulated light beam with a scan direction and the other one of the rows and columns of the spatially modulated light beam with a cross-scan direction for exposing the surface, shearing at least one portion of the modulated light beam with respect to a second portion of the modulated light beam in a cross scan direction by an amount less than a center to center distance between two sub-exposure areas in a cross scan direction, exposing the surface in the scan direction with the sheared spatially modulated light beam, and overlapping exposed sub-areas in the cross scan direction as a result of the scanning.

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Patent Owner(s)

  • ORBOTECH LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Katzir, Yigal Rishon Lezion, IL 35 890
Meimoun, Elie Jerusalem, IL 10 94

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