Thermal evaporation apparatus, use and method of depositing a material
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United States of America Patent
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Dec 25, 2012
Grant Date -
May 17, 2012
app pub date -
Oct 18, 2011
filing date -
Apr 20, 2006
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Abstract
A thermal evaporation apparatus for depositing of a material on a substrate is described. The apparatus can comprise material storage means; heating means to generate a vapour of the material in the material storage means; vapour outlet means comprising a vapour receiving pipe having vapour outlet passages, and emission reducing means arranged such that an external surface of the vapour outlet means directed to said substrate exhibits low emission. Also the use of the apparatus, and a method of depositing a material onto a substrate by thermal evaporation are described.
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