Beam irradiation device
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United States of America Patent
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Jan 1, 2013
Grant Date -
Apr 21, 2011
app pub date -
Oct 19, 2010
filing date -
Oct 19, 2009
priority date (Note) -
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Abstract
A beam irradiation device includes a photodetector which receives servo light and outputs a detection signal depending on a light receiving position of the servo light, and a signal processing section which obtains the light receiving position based on the detection signal. In the above arrangement, the signal processing section has an A/D conversion circuit which converts the detection signal into a digital signal, and an error signal adjusting circuit which converts an error component signal to be outputted from the photodetector when the photodetector is not irradiated by the servo light, into a signal within a processable range of the A/D conversion circuit, and supplies the converted signal to the A/D conversion circuit. A first digital signal derived from the detection signal is corrected with a second digital signal derived from the error component signal.
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