Container and loader for substrate
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United States of America Patent
Stats
-
Jan 8, 2013
Grant Date -
Aug 8, 2002
app pub date -
Dec 21, 2001
filing date -
Oct 19, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.
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