Thermal spray powder, method for forming thermal spray coating, and plasma resistant member
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United States of America Patent
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Jan 8, 2013
Grant Date -
May 22, 2008
app pub date -
Oct 31, 2007
filing date -
Oct 31, 2006
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Abstract
A thermal spray powder contains granulated and sintered particles composed of an oxide of any of the rare earth elements having an atomic number from 60 to 70. The average particle size of the primary particles constituting the granulated and sintered particles is 2 to 10 μm. The crushing strength of the granulated and sintered particles is 7 to 50 MPa. A plasma resistant member includes a substrate and a thermal spray coating provided on the surface of the substrate. The thermal spray coating is formed by thermal spraying, preferably plasma thermal spraying, the thermal spray powder.
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