Bulk acoustic resonator comprising non-piezoelectric layer and bridge
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United States of America Patent
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Jan 8, 2013
Grant Date -
Dec 20, 2012
app pub date -
Jun 24, 2011
filing date -
Jun 16, 2011
priority date (Note) -
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Abstract
A bulk acoustic wave (BAW) resonator, comprises: a first electrode formed on a substrate; a piezoelectric layer formed on the first electrode; a second electrode formed on the first piezoelectric layer; a non-piezoelectric layer formed on the first electrode and adjacent to the piezoelectric layer; and a bridge formed between the non-piezoelectric layer and the first or second electrode.
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