Linear-carrier phase-mask interferometer
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United States of America Patent
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Jan 8, 2013
Grant Date -
Dec 9, 2010
app pub date -
Aug 16, 2010
filing date -
Aug 28, 2003
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Abstract
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.
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