Susceptor for heat treatment and heat treatment apparatus
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United States of America Patent
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Jan 15, 2013
Grant Date -
Feb 14, 2008
app pub date -
Aug 2, 2007
filing date -
Aug 10, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A susceptor for holding a semiconductor wafer to be flash-heated by a flash of light emitted from flash lamps is formed of transparent quartz. The susceptor has a backside surface only which is roughened by shot blasting to provide a ground-glass-like surface. When a flash of light is emitted, part of the flash of light emitted from the flash lamps and passing by a peripheral portion of the semiconductor wafer held by the susceptor into the susceptor reaches the ground-glass-like backside surface and is diffusely reflected therefrom. Part of the diffusely reflected light impinges on the peripheral portion of the semiconductor wafer held by the susceptor to thereby heat the low temperature regions which have appeared in the peripheral portion of the semiconductor wafer.
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