Radio frequency power supply
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United States of America Patent
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-
Jan 22, 2013
Grant Date -
Jan 29, 2009
app pub date -
Jul 23, 2008
filing date -
Jul 23, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.
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