Methods of thermoreflectance thermography
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United States of America Patent
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Jan 29, 2013
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app pub date -
Sep 29, 2008
filing date -
Mar 15, 2005
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Abstract
An embodiment of a method of performing thermoreflectance measurements with an imaging system comprises: reflecting radiation from a number of points in a sample in response to an illuminating radiation while a temperature modulation is applied to the sample; acquiring digital images of the reflected radiation after the reflected radiation passes through an aperture; and deriving a map of relative reflectivity of the sample based on the digital images. At least a portion of the illuminating radiation passes through at least a portion of the sample and is reflected at a change refractive index interface.
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