MEMS microphone with spring suspended backplate

United States of America Patent

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Jan 29, 2013
Grant Date
Nov 4, 2010
app pub date
May 5, 2010
filing date
Mar 26, 2009

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Abstract

A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

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Patent Owner	Address
INVENSENSE INC	1745 TECHNOLOGY DRIVE SUITE 200 SAN JOSE CA 95110

International Classification(s)

H04R:LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR ....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Zhang, Xin	Acton, US	895	8400

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MEMS microphone with spring suspended backplate

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United States of America Patent

12774263

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PATENT NO	8363860
APP PUB NO	20100278372A1
SERIAL NO	12774263
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 29, 2013	US,8363860,B2 US8363860B2	GRANTED PATENT AS SECOND PUBLICATION
November 04, 2010	US,20100278372,A1 US20100278372A1	FIRST PUBLISHED PATENT APPLICATION

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12774263

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