Imprint alignment method, system and template
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United States of America Patent
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Feb 5, 2013
Grant Date -
Nov 4, 2010
app pub date -
Jul 13, 2010
filing date -
Jul 20, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Sets of lithographic templates providing improved lithographic alignment are described. The sets include at least two templates. The first template has an array of first geometries and the second template has an array of second geometries. The second geometries correspond to the first geometries and at least one second geometry is intentionally offset from its corresponding first geometry.
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