Radio-frequency microelectromechanical systems and method of manufacturing such systems
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United States of America Patent
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Feb 5, 2013
Grant Date -
Oct 7, 2010
app pub date -
Oct 26, 2004
filing date -
Oct 31, 2003
priority date (Note) -
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Abstract
An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.
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