Radio-frequency microelectromechanical systems and method of manufacturing such systems

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8367215
APP PUB NO 20100255322A1
SERIAL NO

10578027

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Den, Toonder Jacob M J Eindhoven, NL 5 172
Rijks, Theodoor G S M Eindhoven, NL 3 32
Van, Beek Jozef T M Rosmalen, NL 9 154
Van, Dijken Auke R Eindhoven, NL 1 4

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