Electromechanical device with optical function separated from mechanical and electrical function
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United States of America Patent
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Feb 5, 2013
Grant Date -
Jul 14, 2011
app pub date -
Mar 25, 2011
filing date -
Jul 2, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device includes a movable element over the substrate and an actuation electrode. The movable element includes an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The actuation electrode is under at least a portion of the deformable layer and is disposed laterally from the reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving towards the actuation electrode.
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