Rotary switching valve

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8371334
APP PUB NO 20100229984A1
SERIAL NO

12712609

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A rotary valve (1) includes a valve body (2) formed with a chamber communication passage (24) for flowing a main fluid and a vent communication passage (25) for discharging the main fluid and a cylindrical valve member (3) rotatably held in the valve body (2) and formed with a main passage (31) for flowing the main fluid. The cylindrical valve member (3) is rotated to switch the connection of the main passage (31) between the chamber communication passage (24) and the vent communication passage (25). The rotary switching valve (1) further includes a purge gas passage for passing purge gas in a clearance (11) between the valve body (2) and the cylindrical valve member (3), the purge gas being supplied to the clearance (11) to prevent the main fluid from leaking out of the main passage (31).

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO
CKD CORPORATION250 OUJI 2-CHOME KOMAKI-SHI AICHI 4858551 ?4858551

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okabe, Tsuneyuki Oshu, JP 50 1149
Okura, Shigeyuki Nirasaki, JP 17 101
Ozawa, Yukio Kasugai, JP 8 487
Yajima, Takashi Kasugai, JP 49 698

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