Method of forming inorganic insulating layer and method of fabricating array substrate for display device using the same

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United States of America Patent

PATENT NO 8377265
APP PUB NO 20090023254A1
SERIAL NO

11967660

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of forming an inorganic insulating layer on a substrate comprises supplying a mixed gas between the substrate and a target, and generating a plasma between the substrate and the target. The target comprises a silicon-based material. The method further comprises depositing a plurality of ions from the plasma on the substrate.

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Patent Owner(s)

  • LG DISPLAY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Byung-Chul Seoul, KR 39 459
Hong, Hyun-Seok Goyang-si, KR 45 261
Kim, Hong-Sik Seoul, KR 39 306
Kwack, Hee-Young Seoul, KR 16 135
Lim, Byoung-Ho Gumi-Si, KR 35 349
Lim, Joo-Soo Gumi-si, KR 23 128

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