Method and apparatus for hybrid resolution feedback of a motion stage
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United States of America Patent
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Feb 19, 2013
Grant Date -
Dec 2, 2010
app pub date -
May 27, 2010
filing date -
May 29, 2009
priority date (Note) -
Expired
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Abstract
A method and apparatus is presented for obtaining high resolution positional feedback from motion stages 52 in indexing systems 10 without incurring the costs associated with providing high resolution positional feedback from the entire range of motion by combining low resolution/low cost feedback devices 72 with high resolution/high cost feedback devices 74, 76, 78, 80, 82, 84, 86, 88.
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