Tools and methods for mounting transport rails in a substrate processing system
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United States of America Patent
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Feb 26, 2013
Grant Date -
Nov 12, 2009
app pub date -
Oct 31, 2008
filing date -
May 9, 2008
priority date (Note) -
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Abstract
Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.
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