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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ELECTRO SCIENTIFIC INDUSTRIES LTD	13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229

International Classification(s)

• B23K:SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLA....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Baird, Brian W	Portland, US	38	1001
Bruland, Kelly J	Portland, US	28	713
Hemenway, David Martin	Beaverton, US	27	329
Lo, Ho Wai	Portland, US	31	747
Nilsen, Brady	Beaverton, US	8	104
Swaringen, Stephen N	Rockwall, US	10	269
Vandergiessen, Clint	Beaverton, US	12	105

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 26, 2013	US,8383982,B2   US8383982B2	GRANTED PATENT AS SECOND PUBLICATION
May 29, 2008	US,20080121627,A1   US20080121627A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8383982

Methods and systems for semiconductor structure processing using multiple laser beam spots

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