Methods for visually inspecting interferometric modulators for defects
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United States of America Patent
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Feb 26, 2013
Grant Date -
Oct 6, 2011
app pub date -
Jun 16, 2011
filing date -
Sep 27, 2004
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Expired
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Abstract
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, such as test pad, and then observing the array for discrepancies between the expected optical output and the actual optical output of the array. This method may particularly include, for example, driving a set of non-adjacent rows or columns to a state different from the intervening rows or columns and then observing the optical output of the array.
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