Structure and method for latchup improvement using through wafer via latchup guard ring
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United States of America Patent
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Mar 5, 2013
Grant Date -
Sep 22, 2011
app pub date -
Jun 1, 2011
filing date -
Mar 26, 2009
priority date (Note) -
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Abstract
A structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.
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