Modular base-plate semiconductor polisher architecture

United States of America Patent

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Mar 19, 2013
Grant Date
Jan 7, 2010
app pub date
Jun 24, 2009
filing date
Jul 1, 2008

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Expired

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Abstract

The present invention generally relates to a polishing system. Particularly, the present invention relates a polishing apparatus having one or more modular polishing stations, and a plurality of polishing heads movably connected to a transferring system.

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Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

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B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....

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Inventor Name	Address	# of filed Patents	Total Citations
Yilmaz, Alpay	San Jose, US	29	254

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Modular base-plate semiconductor polisher architecture

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United States of America Patent

12490928

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PATENT NO	8398458
APP PUB NO	20100003902A1
SERIAL NO	12490928
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 19, 2013	US,8398458,B2 US8398458B2	GRANTED PATENT AS SECOND PUBLICATION
January 07, 2010	US,20100003902,A1 US20100003902A1	FIRST PUBLISHED PATENT APPLICATION

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12490928

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