Plasma sources

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United States of America Patent

PATENT NO 8400063
APP PUB NO 20100108905A1
SERIAL NO

12309461

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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This invention relates to a plasma source in the form of plasma generator (13) which utilizes an antenna (11) and an RF source (12). The generated plasma flows into a chamber (14) and ions are accelerated out of the chamber (14) by grid (15). A body 16 is located in the volume for creating local losses and thereby reducing local plasma density.

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Patent Owner(s)

  • AVIZA TECHNOLOGY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
George, Christopher David Bristol, GB 2 3
Lima, Paulo Eduardo Grenoble, FR 1 1
Proudfoot, Gary Oxford, GB 8 88

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