Probe holder

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United States of America Patent

PATENT NO 8402848
SERIAL NO

12681967

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.

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Patent Owner(s)

  • CASCADE MICROTECH DRESDEN GMBH;CASCADE MICROTECH, INC.

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanev, Stojan Thiendorf OT Sacka, DE 44 174
Kiesewetter, Joerg Sacka, DE 9 38
Kreissig, Stefan Venusberg, DE 17 86

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