Laser processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8404999
APP PUB NO 20110084050A1
SERIAL NO

12899757

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser processing apparatus including a laser applying unit. The laser applying unit includes a first laser oscillating unit, a second laser oscillating unit, a first laser branching unit for branching a laser beam oscillated from the first laser oscillating unit into three optical paths, a second laser branching unit for branching a laser beam oscillated from the second laser oscillating unit into three optical paths, three first focusing units for respectively focusing the laser beams through the three optical paths obtained by the first laser branching unit toward a glass substrate, and three second focusing units for respectively focusing the laser beams through the three optical paths obtained by the second laser branching unit. The first focusing units and the second focusing units are alternately arranged in a line in an indexing direction.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Morikazu, Hiroshi Ota-Ku, JP 131 1163
Nomaru, Keiji Ota-Ku, JP 123 635
Togashi, Ken Ota-Ku, JP 13 45

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