Vapor based combinatorial processing
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United States of America Patent
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Apr 2, 2013
Grant Date -
Apr 19, 2012
app pub date -
Dec 21, 2011
filing date -
Sep 5, 2007
priority date (Note) -
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Abstract
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
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