Vapor based combinatorial processing

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United States of America Patent

PATENT NO 8409354
APP PUB NO 20120090545A1
SERIAL NO

13332813

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Abstract

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A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.

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Patent Owner(s)

Patent OwnerAddress
INTERMOLECULAR INCSAN JOSE CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Tony P Campbell, US 208 9948
Lang, Chi-l Cupertino, US 6 30
Shanker, Sunil Santa Clara, US 56 5224

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