Reduced maintenance chemical oxide removal (COR) processing system
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United States of America Patent
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Apr 2, 2013
Grant Date -
Sep 10, 2009
app pub date -
May 21, 2009
filing date -
Mar 17, 2003
priority date (Note) -
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Abstract
A chemical oxide removal (COR) processing system is presented, wherein the COR processing system includes a first treatment chamber and a second treatment chamber. The first treatment chamber comprises a chemical treatment chamber that provides a temperature controlled chamber having a protective barrier. The second treatment chamber comprises a heat treatment chamber that provides a temperature-controlled chamber having a protective barrier.
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