Charging apparatus
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United States of America Patent
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Apr 2, 2013
Grant Date -
Sep 23, 2010
app pub date -
Sep 25, 2008
filing date -
Sep 28, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
Intended is to reduce pressure fluctuations across a filter (14) for filtering a resist liquid. A charging apparatus is provided including a charge liquid tank (2) of resist liquid, a feed pump (10), a charge nozzle (8), a recovery passage (16), a recovery valve (20) disposed in the recovery passage (16), the filter (14), and a control device (24) for controlling the servomotors to adjust the openings of the charge valve (12) and the recovery valve (20) so that the pressures on the upstream side and the downstream side of the filter (14) may not fluctuate.
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