Methods, apparatuses, and systems for micromechanical gas chemical sensing capacitor
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United States of America Patent
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Apr 2, 2013
Grant Date -
Jul 28, 2011
app pub date -
Jan 21, 2011
filing date -
Jan 22, 2010
priority date (Note) -
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Abstract
A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.
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