Laser beam irradiation apparatus and substrate sealing apparatus including the same
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United States of America Patent
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Apr 9, 2013
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N/A
app pub date -
Apr 8, 2011
filing date -
Jul 5, 2010
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Abstract
A laser beam irradiation apparatus comprises: a laser oscillator; an optical fiber for transmitting a laser beam oscillated by the laser oscillator; an optical tube for accommodating an end of the optical fiber, and for performing a rectilinear motion on a plane perpendicular to a direction in which the laser beam is irradiated; and a pair of piezoelectric transducers disposed between the optical tube and the end of the optical fiber, and having first ends supporting the optical fiber. Each piezoelectric transducer performs a rectilinear reciprocating motion in a direction perpendicular to the other piezoelectric transducer on a plane perpendicular to the direction in which the laser beam is irradiated.
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