Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping
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United States of America Patent
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Apr 9, 2013
Grant Date -
N/A
app pub date -
Jun 15, 2011
filing date -
Jun 15, 2011
priority date (Note) -
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Abstract
A purging apparatus for a storage chamber is disclosed. The purging apparatus is configured for establishing a purge gas flow through the storage chamber. The purging apparatus may include a gas purifier and a particle filter. The gas purifier may provide a purge gas to the storage chamber. The purge gas may flow through the storage chamber, and a mixture of the purge gas and potential contaminants may subsequently exit the storage chamber as exhaust gas. The particle filter may receive and filter the exhaust gas. The filtered gas may be provided to the gas purifier for purification and recirculation. The gas purifier may purify the filtered gas by substantially removing at least one of: an acid, a base, an organic compound, water or oxygen from the filtered gas. The purified filtered gas may then be recirculated and provided to the storage chamber as the purge gas.
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