Clamped monolithic showerhead electrode
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United States of America Patent
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Apr 9, 2013
Grant Date -
Oct 11, 2012
app pub date -
Jun 19, 2012
filing date -
Jul 7, 2008
priority date (Note) -
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Abstract
An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.
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