Device for dividing an optical beam into four beams and non-contact optical profilometer comprising same
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United States of America Patent
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Apr 9, 2013
Grant Date -
Feb 23, 2012
app pub date -
Mar 20, 2010
filing date -
Mar 23, 2009
priority date (Note) -
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Abstract
An optical probe for splitting a beam of light into multiple beams. The optical probe may comprise a first polarizing beam splitter having a first polarization axis, a second polarizing beam splitter having a second polarization axis orthogonal to the first polarization axis, a first half wave plate and a second half wave plate, and optionally a first birefringent phase plate, and a second birefringent phase plate. The first half wave plate may be located before first polarizing beam splitter, and the second half wave plate may be located after the first polarizing beam splitter, relative to the propagation of the light beam. The optical probe may further include a lens for collimating the four light beams. A profilometer includes the optical probe for splitting a beam of light into four light beams, and a scanner for traversing the optical probe over a surface of an element to be measured.
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