Biaxial angular velocity sensor
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United States of America Patent
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Apr 16, 2013
Issued Date -
N/A
app pub date -
Jun 18, 2009
filing date -
Jun 23, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A biaxial angular velocity sensor provided herein has good detection sensitivity and allows an oscillator to be fixed stably. The biaxial angular velocity sensor includes an oscillator (3) made of a non-piezoelectric material, an electromechanical energy converting element (23) for driving and electromechanical energy converting element (25) for detection, both of which are provided in the oscillator (3), a plurality of drive electrodes (27) provided corresponding to the electromechanical energy converting element (23) for driving, and a plurality of detection electrodes (29) provided corresponding to the electromechanical energy converting element (25) for detection. The oscillator (3) includes a central portion (5) located in the center of the oscillator and eight first to eighth arm portions (7) to (21). The distal end portions of the fifth to eighth arm portions (15) to (21), located on the opposite side to the central portion (5), are fixed.
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