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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE	195 SEC 4 CHUNG HSING RD CHUTUNG HSINCHU 310401

International Classification(s)

• B06B:GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS I....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chang, Wen-Sheng	Pingtung, TW	21	32
Cheng, Kong-Wei	Hsinchu, TW	10	21
Huang, Jau-Chyn	Hsinchu, TW	16	107
Lee, Tai-Chou	Chiayi, TW	6	13
Wu, Ching-Chen	Taichung, TW	10	218

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 16, 2013	US,8420186,B2   US8420186B2	GRANTED PATENT AS SECOND PUBLICATION
June 26, 2008	US,20080152836,A1   US20080152836A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8420186

Method and apparatus of growing a thin film

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