Composite substrate and method for forming metal pattern
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United States of America Patent
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Apr 16, 2013
Grant Date -
Jul 1, 2010
app pub date -
Dec 15, 2009
filing date -
Dec 25, 2008
priority date (Note) -
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Abstract
A composite substrate is a piezoelectric substrate that is transparent to light used for photolithography, and a supporting substrate for supporting the piezoelectric substrate are bonded together via an organic adhesive layer. Where at least one of the supporting substrate and the organic adhesive layer of the composite substrate absorbs light used for photolithography.
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