Salt and photoresist composition comprising the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8420294
APP PUB NO 20120135351A1
SERIAL NO

13304478

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a salt represented by the formula (I):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITED2-7-1 NIHONBASHI CHUO-KU TOKYO 1036020 ?1036020

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anryu, Yukako Osaka, JP 24 87
Fujita, Shingo Osaka, JP 32 350
Ichikawa, Koji Osaka, JP 316 1995

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