Charged-particle energy analyzer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8421030
APP PUB NO 20110168886A1
SERIAL NO

13119689

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haynes, Robert Pleasanton, US 21 160
Nasser, Ghodsi Mehran Hamilton, US 9 68
Sears, Christopher San Jose, US 51 171
Shadman, Khashayar Mountain View, US 6 74
Toth, Gabor D San Jose, US 13 222

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