Electronic devices including carbon nano-tube films having carbon-based liners, and methods of forming the same
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United States of America Patent
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Apr 16, 2013
Grant Date -
May 6, 2010
app pub date -
Oct 29, 2009
filing date -
Oct 30, 2008
priority date (Note) -
Expired
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Abstract
Methods in accordance with this invention form a microelectronic structure by forming a carbon nano-tube (“CNTâ€) layer, and forming a carbon layer (“carbon linerâ€) above the CNT layer, wherein the carbon liner comprises: (1) a first portion disposed above and in contact with the CNT layer; and/or (2) a second portion disposed in and/or around one or more carbon nano-tubes in the CNT layer. Numerous other aspects are provided.
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