MEMS devices and systems actuated by an energy field
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United States of America Patent
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Apr 16, 2013
Grant Date -
Aug 5, 2010
app pub date -
Apr 17, 2008
filing date -
Apr 17, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.
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