Abnormality detecting apparatus for detecting abnormality at interface portion of contact arm

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United States of America Patent

PATENT NO 8422762
APP PUB NO 20100239155A1
SERIAL NO

12738780

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Abstract

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An abnormality detecting apparatus includes an imaging device for obtaining image data of a TIM, a failure detecting section for detecting appearance failures of the TIM on the basis of the image data of the TIM obtained by the imaging device, and a determining device for determining whether an abnormality occurs at the TIM on the basis of a detection result by the failure detecting section.

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Patent Owner(s)

Patent OwnerAddress
ADVANTEST CORPORATION6-2 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-0005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Masayoshi Tokyo, JP 54 537
Ikeda, Hiroki Tokyo, JP 87 1043

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