MIM capacitor with enhanced capacitance
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United States of America Patent
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Apr 23, 2013
Grant Date -
Apr 7, 2011
app pub date -
May 6, 2010
filing date -
Oct 4, 2006
priority date (Note) -
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Abstract
A method of forming a metal-insulator-metal capacitor having top and bottom plates separated by a dielectric layer, one of the top and bottom plates having at least one protrusion extending into a corresponding cavity in the other of the top and bottom plates, the method including the steps of growing one or more nanofibers on a base surface.
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