Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

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United States of America Patent

PATENT NO 8425741
APP PUB NO 20100084569A1
SERIAL NO

12309464

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Abstract

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This invention relates to a broad beam ion deposition apparatus (100) including an ion source (101), a target (102), a tillable substrate table (103) and an auxiliary port (104). The target (102) is in the form of a carousel which carries a number of targets and the ion source (101) is configured to produce a substantially rectangular section beam (105).

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Patent Owner(s)

  • AVIZA TECHNOLOGY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
George, Christopher David Bristol, GB 2 3
Green, Gordon Robert Bristol, GB 11 146
Lima, Paulo Edurado Gwent, GB 1 2
Proudfoot, Gary Oxford, GB 8 88
Trowell, Robert Kenneth Bristol, GB 9 30

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