Inkjet printhead bridge beam fabrication method
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United States of America Patent
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Apr 23, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 26, 2009
filing date -
Aug 26, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A method of fabricating a bridge beam of an inkjet printhead employs a cavity formed under the bridge beam and an etch-stop layer that limits a back-surface recess formation. The method includes forming a cavity that connects between a bottom of a pair of trenches in and extending from a front surface of a substrate and depositing an etch-stop layer at a bottom of the cavity. The method further includes forming a recess in a back surface of the substrate, the recess exposing the etch-stop layer and the etch-stop layer limiting a depth of the formed recess. The method further includes removing the exposed etch-stop layer to connect the cavity and the recess, the bridge beam being a portion of the substrate above the formed cavity and between the trenches.
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