High-k heterostructure

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United States of America Patent

PATENT NO 8426261
APP PUB NO 20100301420A1
SERIAL NO

12675733

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Abstract

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A method for preparing a multilayer substrate includes the step of deposing an epitaxial γ-Al2O3 Miller index (001) layer on a Si Miller index (001) substrate.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS FRANCEMONTROUGE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
El-Kazzi, Mario Lyons, FR 2 3
Hollinger, Guy Moidieu-Detourbe, FR 3 5
Merckling, Clément Oullins, FR 1 3
Saint-Girons, Guillaume Lyons, FR 3 5

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