Drive element and method for operating a drive element
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United States of America Patent
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Apr 23, 2013
Grant Date -
Sep 9, 2010
app pub date -
Dec 22, 2009
filing date -
Mar 6, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.
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