Probe wafer, probe device, and testing system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8427187
APP PUB NO 20110121848A1
SERIAL NO

12857483

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is provided a testing system for testing a plurality of semiconductor chips formed on a single semiconductor wafer. The testing system includes a wafer substrate, a plurality of wafer connector terminals that are provided on the wafer substrate in such a manner that one or more wafer connector terminals correspond to each of the semiconductor chips, where each wafer connector terminal is to be electrically connected to an input/output terminal of a corresponding semiconductor chip, a plurality of circuit units that are provided on the wafer substrate in such a manner that one or more circuit units corresponds to each of the semiconductor chips, where each circuit unit generates a test signal to be used for testing a corresponding semiconductor chip and supplies the test signal to the corresponding semiconductor chip to test the corresponding semiconductor chip, and a controller that generates a control signal used to control the plurality of circuit units.

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Patent Owner(s)

Patent OwnerAddress
ADVANTEST CORPORATION1-32-1 ASAHI-CHO NERIMA-KU TOKYO 179-0071

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komoto, Yoshio Gunma, JP 10 59
Umemura, Yoshiharu Kanagawa, JP 11 83

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